Measurement Technology for Micro-Nanometer Devices
ISBN-13:
9781118717967
ISBN-10:
1118717961
Edition:
1
Author:
Jingdong Chen, Zongmin Ma, Wendong Zhang, Xiujian Chou, Tielin Shi, Haifei Bao, Liguo Chen, Dachao Li, Chenyang Xue
Publication date:
2017
Publisher:
Wiley
Format:
Hardcover
352 pages
FREE US shipping
Book details
ISBN-13:
9781118717967
ISBN-10:
1118717961
Edition:
1
Author:
Jingdong Chen, Zongmin Ma, Wendong Zhang, Xiujian Chou, Tielin Shi, Haifei Bao, Liguo Chen, Dachao Li, Chenyang Xue
Publication date:
2017
Publisher:
Wiley
Format:
Hardcover
352 pages
Summary
Measurement Technology for Micro-Nanometer Devices (ISBN-13: 9781118717967 and ISBN-10: 1118717961), written by authors
Jingdong Chen, Zongmin Ma, Wendong Zhang, Xiujian Chou, Tielin Shi, Haifei Bao, Liguo Chen, Dachao Li, Chenyang Xue, was published by Wiley in 2017.
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Description
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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