Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
ISBN-13:
9780819423788
ISBN-10:
0819423785
Author:
Robert D. Allen, Harry J. Levinson, Martin C. Peckerar, P. Rai-Choudhury, Mark A. McCord, Franco Cerrina, John G. Skinner, Andrew R. Neureuther, F. Keith Perkins, Michael J. Rooks
Publication date:
1997
Publisher:
Society of Photo-Optical Instrumentation Engineers
Format:
Hardcover
768 pages
FREE US shipping
Book details
ISBN-13:
9780819423788
ISBN-10:
0819423785
Author:
Robert D. Allen, Harry J. Levinson, Martin C. Peckerar, P. Rai-Choudhury, Mark A. McCord, Franco Cerrina, John G. Skinner, Andrew R. Neureuther, F. Keith Perkins, Michael J. Rooks
Publication date:
1997
Publisher:
Society of Photo-Optical Instrumentation Engineers
Format:
Hardcover
768 pages
Summary
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39) (ISBN-13: 9780819423788 and ISBN-10: 0819423785), written by authors
Robert D. Allen, Harry J. Levinson, Martin C. Peckerar, P. Rai-Choudhury, Mark A. McCord, Franco Cerrina, John G. Skinner, Andrew R. Neureuther, F. Keith Perkins, Michael J. Rooks, was published by Society of Photo-Optical Instrumentation Engineers in 1997.
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Description
Copublished with IEE. The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Contents
- Preface
- Introduction
- Optical Lithography
- Electron Beam Lithography
- X-ray Lithography
- Deep-UV Resist Technology
- Photomask fabrication procedures and limitations
- Metrology Methods in Photolithography
- Optical Lithography Modeling
- Issues in Nanolithography for Quantum Effect Device Manufacture
- Index
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