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Third International Symposium on Laser Precision Microfabrication (Proceedings of Spie)

by Isamu Miyamoto, Kojiro F. Kobayashi, Koji Sugioka, Reinhart Poprawe, Henry Helvajian
ISBN-13: 9780819446015
ISBN-10: 0819446017
Edition: illustrated edition
Publication date: 2003
Publisher: Society of Photo Optical
Format: Paperback 614 pages