Scanning Electron Microscopy: Physics of Image Formation and Microanalysis
ISBN-13:
9783540853176
ISBN-10:
3540853170
Edition:
3rd ed. 2021
Author:
Publication date:
2020
Publisher:
Springer
Format:
Hardcover
511 pages
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Book details
ISBN-13:
9783540853176
ISBN-10:
3540853170
Edition:
3rd ed. 2021
Author:
Publication date:
2020
Publisher:
Springer
Format:
Hardcover
511 pages
Summary
Scanning Electron Microscopy: Physics of Image Formation and Microanalysis (ISBN-13: 9783540853176 and ISBN-10: 3540853170), written by authors
, was published by Springer in 2020.
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Description
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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