9780470727300-0470727306-Fundamental Principles of Optical Lithography: The Science of Microfabrication

Fundamental Principles of Optical Lithography: The Science of Microfabrication

ISBN-13: 9780470727300
ISBN-10: 0470727306
Author: Chris Mack
Publication date: 2007
Publisher: Wiley
Format: Paperback 534 pages
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Book details

ISBN-13: 9780470727300
ISBN-10: 0470727306
Author: Chris Mack
Publication date: 2007
Publisher: Wiley
Format: Paperback 534 pages

Summary

Acknowledged authors Chris Mack wrote Fundamental Principles of Optical Lithography: The Science of Microfabrication comprising 534 pages back in 2007. Textbook and eTextbook are published under ISBN 0470727306 and 9780470727300. Since then Fundamental Principles of Optical Lithography: The Science of Microfabrication textbook was available to sell back to BooksRun online for the top buyback price of $ 38.25 or rent at the marketplace.

Description

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components.

By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.

This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.

Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB, to accompany the textbook. You can also contact the author and find help for instructors.

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