Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering)
ISBN-13:
9780199861224
ISBN-10:
0199861226
Edition:
4
Author:
Stephen A. Campbell
Publication date:
2012
Publisher:
Oxford University Press
Format:
Paperback
688 pages
Category:
Electrical & Electronics
,
Engineering
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Book details
ISBN-13:
9780199861224
ISBN-10:
0199861226
Edition:
4
Author:
Stephen A. Campbell
Publication date:
2012
Publisher:
Oxford University Press
Format:
Paperback
688 pages
Category:
Electrical & Electronics
,
Engineering
Summary
Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering) (ISBN-13: 9780199861224 and ISBN-10: 0199861226), written by authors
Stephen A. Campbell, was published by Oxford University Press in 2012.
With an overall rating of 3.9 stars, it's a notable title among other
Electrical & Electronics
(Engineering) books. You can easily purchase or rent Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering) (Paperback) from BooksRun,
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Electrical & Electronics
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Description
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
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